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Modular Process Technology Corporation

Modular Process Technology is a semiconductor equipment manufacturer of Rapid Thermal Processing Systems, hybrid UV-RTP systems, and stand alone UV Ozone Cleaning Systems.

2233 Paragon Drive , San Jose, CA 95131, United States

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Our Company

There are many unique features incorporated into our product lines which make our products attractive to advanced research and development and manufacturing. Modular Process Technology has in-depth experience in fundamental materials science research and process development. Our extensive process technology is reflected in the quality of our system design and integration.
We invite you to tour our web site to learn about the products we offer. Use our feedback page if you have any comments or have questions about our products.


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  • Location:

    Other: 2233 Paragon Drive , San Jose, CA 95131, United States